PROPERTIES OF AIN FILMS DEPOSITED ON N-IMPLANTED AL

被引：19

作者：

OHIRA, S ^{[1
]}

HIEI, K ^{[1
]}

IWAKI, M ^{[1
]}

机构：

[1] INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 32卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90182-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：66 / 70

页数：5

共 11 条

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HSIEH, YF ;

PADMANABHAN, KR ;

CHEVALLIER, J ;

SORENSEN, G .

THIN SOLID FILMS, 1983, 107 (02) :191-199

[2]

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[3] TECHNIQUE FOR DETECTING CRITICAL LOADS IN SCRATCH TEST FOR THIN-FILM ADHESION [J].

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WOODHOUSE, J ;

PESTES, M .

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[4] FRICTION AND WEAR OF ION-IMPLANTED METALS - REVIEW [J].

HARTLEY, NEW .

THIN SOLID FILMS, 1979, 64 (02) :177-190

[5] ION-BEAM MODIFICATION OF TIN FILMS DURING VAPOR-DEPOSITION [J].

KANT, RA ;

SARTWELL, BD .

MATERIALS SCIENCE AND ENGINEERING, 1987, 90 :357-365

[6]

Lo Russo S., 1979, Applied Physics Letters, V34, P527, DOI 10.1063/1.90641

[7] DEVELOPMENTS IN IONIZATION ASSISTED PROCESSES [J].

MATTHEWS, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2354-2363

[8]

Ohira S., 1987, Journal of the Vacuum Society of Japan, V30, P477, DOI 10.3131/jvsj.30.477

[9] FORMATION OF AIN BY NITROGEN MOLECULE ION-IMPLANTATION [J].

OHIRA, S ;

IWAKI, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :162-166

[10] CHARACTERIZATION OF THE ALUMINUM SURFACE-LAYER IMPLANTED WITH NITROGEN [J].

OHIRA, S ;

IWAKI, M .

MATERIALS SCIENCE AND ENGINEERING, 1987, 90 :143-148

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