INTERFACIAL CHEMICAL-REACTIVITY OF METAL CONTACTS WITH THIN NATIVE OXIDES OF GAAS

被引：55

作者：

KOWALCZYK, SP

WALDROP, JR

GRANT, RW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

关键词：

D O I：

10.1116/1.571140

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：611 / 616

页数：6

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