TITANIUM-DIOXIDE DIELECTRIC FILMS FORMED BY RAPID THERMAL-OXIDATION

被引：111

作者：

BURNS, GP

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 05期

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D O I：

10.1063/1.342856

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2095 / 2097

页数：3

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