REACTIVITY AND MECHANISM IN THE CHEMICAL-VAPOR-DEPOSITION OF LATE TRANSITION-METALS

被引：52

作者：

PUDDEPHATT, RJ

机构：

[1] Department of Chemistry, University of Western Ontario, London

来源：

POLYHEDRON | 1994年 / 13卷 / 08期

关键词：

D O I：

10.1016/S0277-5387(00)80257-0

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

An overview is given of the current knowledge of factors influencing reactivity and mechanism in the chemical vapour deposition of the late transition elements from organometallic precursors. Attention is focussed on the CVD of platinum and gold as examples of catalytically active and non-active metals respectively, and the mechanisms of thermolysis at the gas/solid and solution/solid interfaces are compared.

引用

页码：1233 / 1243

页数：11

共 105 条

[1] AYLETT MR, 1986, CHEMTRONICS, V1, P146
[2] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD - THE EFFECT OF ORGANOMETALLIC STRUCTURE
BAUM, TH
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (10) : 2616 - 2619
[3] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF METALS FOR MICROELECTRONICS TECHNOLOGY
BAUM, TH
COMITA, PB
[J]. THIN SOLID FILMS, 1992, 218 (1-2) : 80 - 94
[4] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD
BAUM, TH
JONES, CR
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (05) : 538 - 540
[5] A NOVEL COPPER COMPLEX AND CVD PRECURSOR - (ETA-2-2-BUTYNE)COPPER(I) HEXAFLUOROACETYLACETONATE
BAUM, TH
LARSON, CE
[J]. CHEMISTRY OF MATERIALS, 1992, 4 (02) : 365 - 369
[6] BAUM TH, 1992, Patent No. 5096737
[7] BEACH DB, 1990, MATER RES SOC SYMP P, V181, P73, DOI 10.1557/PROC-181-73
[8] LOW-TEMPERATURE CHEMICAL VAPOR-DEPOSITION OF HIGH-PURITY COPPER FROM AN ORGANOMETALLIC SOURCE
BEACH, DB
LEGOUES, FK
HU, CK
[J]. CHEMISTRY OF MATERIALS, 1990, 2 (03) : 216 - 219
[9] NEW METALLOORGANIC PRECURSORS FOR SURFACE PROCESSING
BRADLEY, DC
[J]. APPLIED SURFACE SCIENCE, 1990, 46 (1-4) : 1 - 4
[10] THE PHOTOLYTIC LASER CHEMICAL VAPOR-DEPOSITION RATE OF PLATINUM, ITS DEPENDENCE ON WAVELENGTH, PRECURSOR VAPOR-PRESSURE, LIGHT-INTENSITY, AND LASER-BEAM DIAMETER
BRAICHOTTE, D
GARRIDO, C
VANDENBERGH, H
[J]. APPLIED SURFACE SCIENCE, 1990, 46 (1-4) : 9 - 18

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