ETCHING OF SURFACES WITH 8-KEV ARGON IONS

被引：51

作者：

CUNNINGHAM, RL

HAYMANN, P

LECOMTE, C

MOORE, WJ

TRILLAT, JJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1960年 / 31卷 / 05期

关键词：

D O I：

10.1063/1.1735705

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：839 / 842

页数：4

相关论文

共 13 条

[1] DIREKTE SICHTBARMACHUNG VON METALLOBERFLACHEN MIT IONENAUSGELOSTEN ELEKTRONEN
BAYH, W
[J]. ZEITSCHRIFT FUR PHYSIK, 1958, 151 (03): : 281 - 295
[2] APPLICATION OF THE ION BOMBARDMENT CLEANING METHOD TO TITANIUM, GERMANIUM, SILICON, AND NICKEL AS DETERMINED BY LOW-ENERGY ELECTRON DIFFRACTION
FARNSWORTH, HE
SCHLIER, RE
GEORGE, TH
BURGER, RM
[J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (08) : 1150 - 1161
[3] GERVAIS H, 1957, VIDE, V12, P416
[4] HAYMANN P, 1959, CR HEBD ACAD SCI, V248, P2472
[5] MEASUREMENTS AND COLLISION - RADIATION DAMAGE THEORY OF HIGH-VACUUM SPUTTERING
KEYWELL, F
[J]. PHYSICAL REVIEW, 1955, 97 (06): : 1611 - 1619
[6] SELECTIVE DELINEATION OF SCREW DISLOCATIONS BY CATHODIC SPUTTERING
MECKEL, BB
SWALIN, RA
[J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (01) : 89 - 93
[7] MOLLENSTADT G, 1956, RADEX RUNDSCHAU, V153
[8] FOCUSING IN COLLISION PROBLEMS IN SOLIDS
SILSBEE, RH
[J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (11) : 1246 - 1250
[9] THE MACROMOSAIC STRUCTURE OF TIN SINGLE CRYSTALS
TEGHTSOONIAN, E
CHALMERS, B
[J]. CANADIAN JOURNAL OF PHYSICS, 1951, 29 (05) : 370 - 381
[10] FURTHER OBSERVATIONS ON THE MACROMOSAIC STRUCTURE OF TIN SINGLE CRYSTALS
TEGHTSOONIAN, E
CHALMERS, B
[J]. CANADIAN JOURNAL OF PHYSICS, 1952, 30 (05) : 388 - &