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CALCULATION OF DOPING PROFILES FROM C(V) MEASUREMENTS ON 2-SIDED JUNCTIONS
被引:13
作者
:
DEMAN, HJJ
论文数:
0
引用数:
0
h-index:
0
DEMAN, HJJ
机构
:
来源
:
IEEE TRANSACTIONS ON ELECTRON DEVICES
|
1970年
/ ED17卷
/ 12期
关键词
:
D O I
:
10.1109/T-ED.1970.17131
中图分类号
:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号
:
0808 ;
0809 ;
摘要
:
引用
收藏
页码:1087 / &
相关论文
共 5 条
[1]
COERVER LE, 1970, IEEE T, VED17, P436
[2]
ON MEASUREMENT OF IMPURITY ATOM DISTRIBUTIONS BY DIFFERENTIAL CAPACITANCE TECHNIQUE
[J].
KENNEDY, DP
论文数:
0
引用数:
0
h-index:
0
KENNEDY, DP
;
OBRIEN, RR
论文数:
0
引用数:
0
h-index:
0
OBRIEN, RR
.
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1969,
13
(02)
:212
-&
[3]
ON MEASUREMENT OF IMPURITY ATOM DISTRIBUTIONS IN SILICON BY DIFFERENTIAL CAPACITANCE TECHNIQUE
[J].
KENNEDY, DP
论文数:
0
引用数:
0
h-index:
0
KENNEDY, DP
;
MURLEY, PC
论文数:
0
引用数:
0
h-index:
0
MURLEY, PC
;
KLEINFELDER, W
论文数:
0
引用数:
0
h-index:
0
KLEINFELDER, W
.
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1968,
12
(05)
:399
-+
[4]
IMPURITY DISTRIBUTION IN EPITAXIAL SILICON FILMS
[J].
THOMAS, CO
论文数:
0
引用数:
0
h-index:
0
THOMAS, CO
;
KAHNG, D
论文数:
0
引用数:
0
h-index:
0
KAHNG, D
;
MANZ, RC
论文数:
0
引用数:
0
h-index:
0
MANZ, RC
.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(11)
:1055
-1061
[5]
MEASUREMENT OF IONIZATION RATES IN DIFFUSED SILICON P-N JUNCTIONS
[J].
VANOVERSTRAETEN, R
论文数:
0
引用数:
0
h-index:
0
VANOVERSTRAETEN, R
;
DEMAN, H
论文数:
0
引用数:
0
h-index:
0
DEMAN, H
.
SOLID-STATE ELECTRONICS,
1970,
13
(05)
:583
-+
←
1
→
共 5 条
[1]
COERVER LE, 1970, IEEE T, VED17, P436
[2]
ON MEASUREMENT OF IMPURITY ATOM DISTRIBUTIONS BY DIFFERENTIAL CAPACITANCE TECHNIQUE
[J].
KENNEDY, DP
论文数:
0
引用数:
0
h-index:
0
KENNEDY, DP
;
OBRIEN, RR
论文数:
0
引用数:
0
h-index:
0
OBRIEN, RR
.
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1969,
13
(02)
:212
-&
[3]
ON MEASUREMENT OF IMPURITY ATOM DISTRIBUTIONS IN SILICON BY DIFFERENTIAL CAPACITANCE TECHNIQUE
[J].
KENNEDY, DP
论文数:
0
引用数:
0
h-index:
0
KENNEDY, DP
;
MURLEY, PC
论文数:
0
引用数:
0
h-index:
0
MURLEY, PC
;
KLEINFELDER, W
论文数:
0
引用数:
0
h-index:
0
KLEINFELDER, W
.
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1968,
12
(05)
:399
-+
[4]
IMPURITY DISTRIBUTION IN EPITAXIAL SILICON FILMS
[J].
THOMAS, CO
论文数:
0
引用数:
0
h-index:
0
THOMAS, CO
;
KAHNG, D
论文数:
0
引用数:
0
h-index:
0
KAHNG, D
;
MANZ, RC
论文数:
0
引用数:
0
h-index:
0
MANZ, RC
.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(11)
:1055
-1061
[5]
MEASUREMENT OF IONIZATION RATES IN DIFFUSED SILICON P-N JUNCTIONS
[J].
VANOVERSTRAETEN, R
论文数:
0
引用数:
0
h-index:
0
VANOVERSTRAETEN, R
;
DEMAN, H
论文数:
0
引用数:
0
h-index:
0
DEMAN, H
.
SOLID-STATE ELECTRONICS,
1970,
13
(05)
:583
-+
←
1
→