ELECTRON HEATING IN LOW-PRESSURE RF GLOW-DISCHARGES

被引：117

作者：

SURENDRA, M ^{[1
]}

GRAVES, DB ^{[1
]}

MOREY, IJ ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

来源：

APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 11期

关键词：

D O I：

10.1063/1.102604

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Particle-in-cell simulations of radio frequency glow discharges between parallel-plate electrodes were performed to test the role of secondary emission at applied frequencies above the ion plasma frequency. With the secondary electron emission coefficient set to zero, the high-energy tail of the electron energy distribution function in the center of the glow is modulated at the applied frequency, and these energetic electrons show substantial anisotropy. In addition, a pulse of ionization propagates across the glow, correpsonding to the directed velocity of the high-energy electrons in the center of the glow. These high-energy electrons originate at the plasma-sheath boundary and appear to be the result of sheath heating.

引用

页码：1022 / 1024

页数：3

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