MARKER MOTION DURING ELECTROMIGRATION IN THIN-FILMS

被引:6
作者
OHRING, M
SUN, PH
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 01期
关键词
D O I
10.1116/1.1316582
中图分类号
O59 [应用物理学];
学科分类号
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页码:284 / &
相关论文
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