HYDROGEN-INDUCED PLATELETS IN SILICON - INFRARED-ABSORPTION AND RAMAN-SCATTERING

被引:75
作者
HEYMAN, JN
AGER, JW
HALLER, EE
JOHNSON, NM
WALKER, J
DOLAND, CM
机构
[1] LAWRENCE BERKELEY LAB, BERKELEY, CA 94720 USA
[2] UNIV CALIF BERKELEY, DEPT MAT SCI & MINERAL ENGN, BERKELEY, CA 94720 USA
[3] XEROX CORP, PALO ALTO RES CTR, PALO ALTO, CA 94304 USA
关键词
D O I
10.1103/PhysRevB.45.13363
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The local vibrational modes of hydrogen-induced platelets in crystalline silicon have been studied using infrared absorption and Raman-scattering spectroscopy. Four overlapping but distinct bands are observed in the region 2000-2200 cm-1. Hydrogen-isotope substitution confirms that these are hydrogen-related stretching vibrations. Hydrogen concentrations obtained from the integrated infrared band intensities are comparable to total hydrogen concentrations obtained from secondary-ion mass spectroscopy. Relative intensities of the bands depend on sample history and can be varied by annealing. This indicates that the four bands arise from at least three distinct structures. Polarization-sensitive Raman measurements indicate that the Raman-active local modes transform according to the fully symmetric representation of a trigonal point group. One structure possesses distinct ir and Raman-active local modes. We conclude that the platelets are highly ordered structures with fundamental building blocks consisting of silicon atoms with one hydrogen-saturated bond, and that at least one inversion-symmetric structure exists. We compare our results with previously proposed structures.
引用
收藏
页码:13363 / 13366
页数:4
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