HYDROGEN IN CRYSTALLINE SEMICONDUCTORS - A REVIEW OF EXPERIMENTAL RESULTS

被引:97
作者
JOHNSON, NM
DOLAND, C
PONCE, F
WALKER, J
ANDERSON, G
机构
[1] Xerox Palo Alto Research Center, Palo Alto
来源
PHYSICA B | 1991年 / 170卷 / 1-4期
关键词
D O I
10.1016/0921-4526(91)90104-M
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The range of phenomena associated with the introduction of hydrogen into single-crystal semiconductors is reviewed with emphasis on the following current topics: dissociation of hydrogen-dopant complexes, diatomic hydrogen complexes, and hydrogen-induced defects. Included is a tabulation of the parameters that have thus far been deduced from experimental studies on hydrogen-dopant complexes and hydrogen migration in crystalline silicon and gallium arsenide.
引用
收藏
页码:3 / 20
页数:18
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