A NEW APPLICATION OF SOFT-X-RAY SPECTROSCOPY TO A NON-DESTRUCTIVE ANALYSIS OF A FILM SUBSTRATE CONTACT SYSTEM - CARBONIZED-LAYER (ULTRA-THIN-FILM) SI(100)

被引：22

作者：

IWAMI, M

KUSAKA, M

HIRAI, M

NAKAMURA, H

SHIBAHARA, K

MATSUNAMI, H

机构：

[1] OSAKA ELECTROCOMMUN UNIV,NEYAGAWA,OSAKA 572,JAPAN

[2] KYOTO UNIV,DEPT ELECT ENGN,KYOTO 606,JAPAN

来源：

SURFACE SCIENCE | 1988年 / 199卷 / 03期

关键词：

D O I：

10.1016/0039-6028(88)90915-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：467 / 475

页数：9

共 10 条

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