INFRARED PHOTODETECTION USING A-SI-H PHOTODIODE

被引:25
作者
OKAMURA, M
SUZUKI, S
机构
[1] NTT Interdisciplinary Research Laboratories, Midori-cho, Musashino-shi
关键词
D O I
10.1109/68.275503
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is experimentally demonstrated for the first time that an a-Si:H photodiode with reach-through structure can detect infrared light of 1.31 mum and 1.55 mum. A maximum gain-quantum efficiency product of 0.58 is obtained at a reverse bias of -10 V under 100 muW illumination at 1.31 mum. This value of gain-quantum efficiency product is comparable to the quantum efficiency of a non-gain-enhanced a-Si:H pin photodiode at visible wavelengths.
引用
收藏
页码:412 / 414
页数:3
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