SCANNING TECHNIQUE WITH SLOW ELECTRONS FOR INVESTIGATION OF INTEGRATED CIRCUITS

被引：6

作者：

BAUER, K

BLOSS, W

机构：

来源：

关键词：

D O I：

10.1049/el:19670378

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：475 / &

共 10 条

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Theile, R.
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[8] AN IMPROVED SCANNING ELECTRON MICROSCOPE FOR OPAQUE SPECIMENS
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