APPLICATIONS OF SCANNING ELECTRON MICROSCOPE TO SOLID-STATE DEVICES

[1] BAKISH R, 1962, INTRODUCTION ELECTRO

[2] CRAWFORD CK, 1962, INTRODUCTION ELECTRO

[3] EARLY JM, 1960, P IRE, V48, P1905

[4] Evekhart T.E., 1959, J ELECT CONTROL, V7, P97, DOI 10.1080/00207215908937191

[5] NOVEL METHOD OF SEMICONDUCTOR DEVICE MEASUREMENTS [J]. PROCEEDINGS OF THE IEEE, 1964, 52 (12) : 1642 - &

[6] EVALUATION OF PASSIVATED INTEGRATED CIRCUITS USING THE SCANNING ELECTRON MICROSCOPE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (08) : 929 - 936

[7] WIDE-BAND DETECTOR FOR MICRO-MICROAMPERE LOW-ENERGY ELECTRON CURRENTS [J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1960, 37 (07): : 246 - 248

[8] SILICON INSULATED-GATE FIELD-EFFECT TRANSISTOR [J]. PROCEEDINGS OF THE IEEE, 1963, 51 (09) : 1190 - &

[9] KAHN D, 1960, IREAIEE SOLIDSTATE D

[10] AN IMPROVED SCANNING ELECTRON MICROSCOPE FOR OPAQUE SPECIMENS [J]. PROCEEDINGS OF THE INSTITUTION OF ELECTRICAL ENGINEERS-LONDON, 1953, 100 (75): : 245 - 259

[1] BAKISH R, 1962, INTRODUCTION ELECTRO

[2] CRAWFORD CK, 1962, INTRODUCTION ELECTRO

[3] EARLY JM, 1960, P IRE, V48, P1905

[4] Evekhart T.E., 1959, J ELECT CONTROL, V7, P97, DOI 10.1080/00207215908937191

[5] NOVEL METHOD OF SEMICONDUCTOR DEVICE MEASUREMENTS [J]. PROCEEDINGS OF THE IEEE, 1964, 52 (12) : 1642 - &

[6] EVALUATION OF PASSIVATED INTEGRATED CIRCUITS USING THE SCANNING ELECTRON MICROSCOPE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (08) : 929 - 936

[7] WIDE-BAND DETECTOR FOR MICRO-MICROAMPERE LOW-ENERGY ELECTRON CURRENTS [J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1960, 37 (07): : 246 - 248

[8] SILICON INSULATED-GATE FIELD-EFFECT TRANSISTOR [J]. PROCEEDINGS OF THE IEEE, 1963, 51 (09) : 1190 - &

[9] KAHN D, 1960, IREAIEE SOLIDSTATE D

[10] AN IMPROVED SCANNING ELECTRON MICROSCOPE FOR OPAQUE SPECIMENS [J]. PROCEEDINGS OF THE INSTITUTION OF ELECTRICAL ENGINEERS-LONDON, 1953, 100 (75): : 245 - 259