HARMONIC HEAT-FLOW IN ISOTROPIC LAYERED SYSTEMS AND ITS USE FOR THIN-FILM THERMAL-CONDUCTIVITY MEASUREMENTS

被引:94
作者
REICHLING, M
GRONBECK, H
机构
[1] GOTHENBURG UNIV,DEPT PHYS,S-41296 GOTHENBURG,SWEDEN
[2] CHALMERS UNIV TECHNOL,S-41296 GOTHENBURG,SWEDEN
关键词
D O I
10.1063/1.356338
中图分类号
O59 [应用物理学];
学科分类号
摘要
A theoretical model is presented describing harmonic heat flow in a two layer system heated by a modulated Gaussian laser beam. Amplitude and phase of the modulated temperature rise in the layers, as well as in the backing substrate and adjacent atmosphere, are calculated by solving the three-dimensional heat conduction equation with a source term including exponential absorption of the laser light in one or two layers. Heat conduction is assumed to be isotropic throughout the system, however, a thermal contact resistance between the two layers can be taken into account. Results are presented for single and double layer systems of gold and various dielectric thin film materials on glass substrates. Amplitude and phase of the harmonic temperature variation are calculated either as a function of position in the sample system or at the surface as a function of the laser beam modulation frequency. It is found that both amplitude and phase of the calculated temperature rise exhibit typical thin film features in their frequency dependence, however, the phase is more sensitive to thin film phenomena than the amplitude. The phase shows typical extrema in that frequency region, where the thermal diffusion length in the film is equal to the film thickness. Based on these findings, we demonstrate how these calculations can be utilized for the interpretation of thin film thermal parameter measurements. The influence of thermal wave interference is demonstrated, and it is discussed how the main thermal parameters like conductivity, effusivity, and thermal contact resistance of the thin film system can be extracted from measurements by a fit of theoretical curves to experimental data. Applying a simple one-dimensional thermal expansion model, surface displacements for thin film systems are calculated and the applicability of photothermal surface displacement for thin film conductivity measurements is discussed.
引用
收藏
页码:1914 / 1922
页数:9
相关论文
共 50 条
  • [1] SOME CALCULATIONS OF TEMPERATURE PROFILES IN THIN-FILMS WITH LASER-HEATING
    ABRAHAM, E
    HALLEY, JM
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 42 (04): : 279 - 285
  • [2] HEAT-FLOW IN INTERFERENCE FILTERS
    ABRAHAM, E
    OGILVY, IJM
    [J]. APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1987, 42 (01): : 31 - 34
  • [3] THERMAL-CONDUCTIVITY OF THIN-FILMS
    BAIER, V
    VOLKLEIN, F
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 118 (02): : K69 - K71
  • [4] BALAGEAS D, 1990, EUROPEAN C THERMOPHY
  • [5] PHOTOACOUSTIC MEASUREMENT OF EFFECTIVE THERMAL-PROPERTIES OF ROUGH AND POROUS LIMITER GRAPHITE
    BEIN, BK
    KRUEGER, S
    PELZL, J
    [J]. CANADIAN JOURNAL OF PHYSICS, 1986, 64 (09) : 1208 - 1216
  • [6] BEYFUSS M, 1992, PHOTOACOUSTIC PHOT 3, V69, P692
  • [7] THERMOOPTICAL SPECTROSCOPY - DETECTION BY THE MIRAGE EFFECT
    BOCCARA, AC
    FOURNIER, D
    BADOZ, J
    [J]. APPLIED PHYSICS LETTERS, 1980, 36 (02) : 130 - 132
  • [8] Boiko B. T., 1973, Thin Solid Films, V17, P157, DOI 10.1016/0040-6090(73)90124-7
  • [9] THERMAL-CONDUCTIVITY OF THIN SIO2-FILMS
    BROTZEN, FR
    LOOS, PJ
    BRADY, DP
    [J]. THIN SOLID FILMS, 1992, 207 (1-2) : 197 - 201
  • [10] CARSLAW HS, 1959, CONDUCTIIN HEAT SOLI