MACROSCOPIC MODELING OF RADIO-FREQUENCY PLASMA DISCHARGES

被引：85

作者：

MISIUM, GR ^{[1
]}

LICHTENBERG, AJ ^{[1
]}

LIEBERMAN, MA ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576220

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1007 / 1013

页数：7

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WINTERS, HF .

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[5]

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[6]

Godyak V.A., 1979, SOV J PLASMA PHYS, V5, P227

[7]

Godyak V. A, 1986, SOVIET RADIO FREQUEN

GODYAK, VA ;

KHANNEH, AS .

[9]

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[10]

GODYAK VA, 1979, SOV J PLASMA PHYS, V5, P376