CASCADE MODEL FOR REDUCTION OF FIELD-EFFECT MOBILITY OF ELECTRONS IN LIGHTLY DOPED CHANNEL OF SUB-MICRON GATE SI THIN-FILM FIELD-EFFECT TRANSISTORS

被引:1
作者
HATORI, F
ASADA, K
SUGANO, T
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 08期
关键词
D O I
10.1143/JJAP.28.1348
中图分类号
O59 [应用物理学];
学科分类号
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页码:1348 / 1353
页数:6
相关论文
共 10 条
[1]   NUMERICAL-SIMULATION OF POLYCRYSTALLINE-SILICON MOSFETS [J].
GUERRIERI, R ;
CIAMPOLINI, P ;
GNUDI, A ;
RUDAN, M ;
BACCARANI, G .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (08) :1201-1206
[2]  
HATORI F, 1988, IEICE ED8888 TECH RE
[3]  
KOBAYASHI T, 1988, 20TH 1988 INT C SOL, P5
[4]   MODELING AND OPTIMIZATION OF MONOLITHIC POLYCRYSTALLINE SILICON RESISTORS [J].
LU, NCC ;
GERZBERG, L ;
LU, CY ;
MEINDL, JD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (07) :818-830
[5]   HIGH-PERFORMANCE THIN-FILM TRANSISTORS FROM OPTIMIZED POLYCRYSTALLINE SILICON FILMS [J].
MEAKIN, DB ;
COXON, PA ;
MIGLIORATO, P ;
STOEMENOS, J ;
ECONOMOU, NA .
APPLIED PHYSICS LETTERS, 1987, 50 (26) :1894-1896
[6]   THE ONE PHONON RAMAN-SPECTRUM IN MICROCRYSTALLINE SILICON [J].
RICHTER, H ;
WANG, ZP ;
LEY, L .
SOLID STATE COMMUNICATIONS, 1981, 39 (05) :625-629
[7]  
SAHMED S, 1986, IEEE T ELECTRON DEV, V33, P973
[8]   ELECTRICAL PROPERTIES OF POLYCRYSTALLINE SILICON FILMS [J].
SETO, JYW .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (12) :5247-5254
[9]  
SHINOHARA T, 1988, IEICE SDM8827 TECH R
[10]   POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS ON A NOVEL 800-DEGREES-C GLASS SUBSTRATE [J].
TROXELL, JR ;
HARRINGTON, MI ;
ERSKINE, JC ;
DUMBAUGH, WH ;
FEHLNER, FP ;
MILLER, RA .
IEEE ELECTRON DEVICE LETTERS, 1986, 7 (11) :597-599