LOW-THRESHOLD PULSED OPERATION OF LONG-WAVELENGTH LASERS ON SI FABRICATED BY DIRECT BONDING

被引:18
作者
MORI, K
TOKUTOME, K
SUGOU, S
机构
[1] Optoelectronics Research Laboratories, NEC Corporation, Tsukuba, Ibaraki 305, 34, Miyukigaoka
关键词
SEMICONDUCTOR JUNCTION LASERS; SEMICONDUCTOR QUANTUM WELLS; WAFER BONDING;
D O I
10.1049/el:19950179
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Low-threshold room-temperature pulsed operation of InGaAs/InGaAsP multiquantum-well (MQW)lasers (lambda similar or equal to 1.55 mu m) on Si substrates is demonstrated. These laser structures were first mown on InP substrates, then bonded at 700 degrees C onto Si substrates with buffer layers. The mesa-stripe broad-area lasers have a threshold current density of 1.7 kA/cm(2) (50 mu m mesa width, 330 mu m cavity length), which is comparable to the value for lasers on InP substrates.
引用
收藏
页码:284 / 285
页数:2
相关论文
共 6 条
[1]  
LO HY, 1991, APPL PHYS LETT, V58, P1961
[2]  
LO HY, 1993, APPL PHYS LETT, V62, P1038
[3]   HIGH-QUALITY INGAAS/INP MULTI-QUANTUM-WELL STRUCTURES ON SI FABRICATED BY DIRECT BONDING [J].
MORI, K ;
TOKUTOME, K ;
NISHI, K ;
SUGOU, S .
ELECTRONICS LETTERS, 1994, 30 (12) :1008-1009
[4]   STABLE CW OPERATION AT ROOM-TEMPERATURE OF A 1.5-MU-M WAVELENGTH MULTIPLE QUANTUM-WELL LASER ON A SI SUBSTRATE [J].
SUGO, M ;
MORI, H ;
SAKAI, Y ;
ITOH, Y .
APPLIED PHYSICS LETTERS, 1992, 60 (04) :472-473
[5]   DISLOCATION GENERATION OF GAAS ON SI IN THE COOLING STAGE [J].
TACHIKAWA, M ;
MORI, H .
APPLIED PHYSICS LETTERS, 1990, 56 (22) :2225-2227
[6]   ELECTRICAL CHARACTERISTICS OF DIRECTLY-BONDED GAAS AND INP [J].
WADA, H ;
OGAWA, Y ;
KAMIJOH, T .
APPLIED PHYSICS LETTERS, 1993, 62 (07) :738-740