AMORPHIZATION MECHANISMS IN ION-IMPLANTED METAL-FILMS AND SINGLE-CRYSTALS

被引：10

作者：

SEIDEL, A

LINKER, G

MEYER, O

机构：

[1] Kernforschungszentrum Karlsruhe, Germany

来源：

JOURNAL OF THE LESS-COMMON METALS | 1988年 / 145卷 / 1-2期

关键词：

D O I：

10.1016/0022-5088(88)90265-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：89 / 95

页数：7

共 14 条

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[7] SEEMAN-BOHLIN X-RAY DIFFRACTOMETER FOR THIN FILMS [J].

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[8]

Krivoglaz M., 1969, THEORY XRAY THERMAL

[9] AMORPHIZATION OF NIOBIUM FILMS BY BORON ION-IMPLANTATION [J].

LINKER, G .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :105-110

[10] THE OCCURRENCE OF STRAIN IN AMORPHIZATION STUDIES BY ION-IMPLANTATION - BORON INTO NIOBIUM AND MOLYBDENUM FILMS [J].

LINKER, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :526-532

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