MULTICHANNEL MICROELECTRODE PROBES MACHINED IN SILICON

被引：3

作者：

LEONG, KH

ENSELL, G

WALL, P

PICKARD, RS

机构：

[1] UNIV COLL CARDIFF,COLL CARDIFF,SCH PURE & APPL BIOL,CARDIFF CF1 1XL,WALES

[2] UNIV SOUTHAMPTON,DEPT ELECTR & COMP SCI,SOUTHAMPTON SO9 5NH,HANTS,ENGLAND

来源：

BIOSENSORS & BIOELECTRONICS | 1990年 / 5卷 / 04期

关键词：

biosensors; in-vivo; microelectrodes; microsensors; neuromuscular; PCM; printed-circuit; probes; thin-film; VLSI;

D O I：

10.1016/0956-5663(90)85003-U

中图分类号：

Q6 [生物物理学];

学科分类号：

071011 ;

摘要：

Four-channel and 12-channel printed-circuit microelectrodes have been micromachined in silicon with polysilicon conductors and silicon nitride insulation. The sensory terminals consist of polysilicon exposed through a 4-μ diameter well in the silicon nitride. Technology for releasing nonrectangular, tapered probes from production silicon wafers is illustrated. The development of these devices as potential substrates for invivo biosensors is discussed. © 1990.

引用

页码：303 / 310

页数：8

共 18 条

[1] SOLID-STATE ELECTRODES FOR MULTICHANNEL MULTIPLEXED INTRACORTICAL NEURONAL RECORDING [J].