SUBSURFACE PROCESSING OF ELECTRONIC MATERIALS ASSISTED BY ATOMIC DISPLACEMENTS

被引：22

作者：

WILLIAMS, JS

机构：

来源：

MRS BULLETIN | 1992年 / 17卷 / 06期

关键词：

D O I：

10.1557/S0883769400041464

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：47 / 51

页数：5

共 31 条

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