共 10 条
[1]
ALFEROV ZI, 1978, TOPICAL M INTEGRATED
[8]
APPLICATION OF MOIRE TECHNIQUES IN SCANNING ELECTRON-BEAM LITHOGRAPHY AND MICROSCOPY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975, 12 (06)
:1262-1265
[10]
WANG S, 1977, IEEE J QUANTUM ELECT, V13, P176, DOI 10.1109/JQE.1977.1069303