HIGH-RESOLUTION IMAGING WITH HIGH-ENERGY ION-BEAMS

被引：46

作者：

LEGGE, GJF

LAIRD, JS

MASON, LM

SAINT, A

CHOLEWA, M

JAMIESON, DN

机构：

[1] Micro Analytical Research Centre (MARC), School of Physics, University of Melbourne, Parkville

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 77卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(93)95539-H

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The limits to high spatial resolution and the requirements for its achievement are discussed. A decade of evolution in high energy ion microscopy is reviewed, the principles, performances and possibilities of the many techniques are discussed. The resultant extreme demands placed upon the microprobe system are described. Finally, possibilities of, requirements for and progress towards nanometre resolution are reviewed.

引用

页码：153 / 168

页数：16

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