INDUSTRIAL APPLICATIONS OF HIGH-ENERGY MICRO-BEAMS

被引：4

作者：

BAKHRU, H

NICKLES, E

HABERL, AW

机构：

[1] University at Albany, Albany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1995年 / 99卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)00566-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The University at Albany ion scanning microprobe has been used for industrial applications. Several examples of such applications will be presented. Focused proton and helium ion beams of 1-2 mu m dimensions have been used for the analysis. Rutherford backscattering spectrometry (RES) and particle induced X-ray emission (PIXE) analysis have been performed on very large scale integrated circuits, thin film superconductors, small structures of high voltage cables and for several other industrial applications. Several examples of chemical and microstructural analysis will be presented.

引用

页码：410 / 413

页数：4

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