MICROBEAM RBS AND PIXE APPLIED TO MICROELECTRONICS

被引：17

作者：

MORRIS, WG ^{[1
]}

FESSEHA, S ^{[1
]}

BAKHRU, H ^{[1
]}

机构：

[1] SUNY ALBANY,ALBANY,NY 12222

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 24-5卷

关键词：

D O I：

10.1016/S0168-583X(87)80213-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：635 / 637

页数：3

共 11 条

[1] COMPARISON OF NPN TRANSISTORS FABRICATED WITH BROAD BEAM AND SPATIAL PROFILING USING FOCUSED BEAM ION-IMPLANTATION [J].

CHU, SD ;

CORELLI, JC ;

STECKL, AJ ;

REUSS, RH ;

CLARK, WM ;

RENSCH, DB ;

MORRIS, WG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :375-379

[2] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J].

DOOLITTLE, LR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03) :344-351

[3] A SEMIAUTOMATIC ALGORITHM FOR RUTHERFORD BACKSCATTERING ANALYSIS [J].

DOOLITTLE, LR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :227-231

[4] MULTIDIMENSIONAL ION MICROBEAM ANALYSIS [J].

DOYLE, BL .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :654-660

[5]

FISCHER BE, 1985, NUCL I METH B, V10, P69

[6] MICROBEAM IMAGING AT MICRON AND SUBMICRON RESOLUTION [J].

LEGGE, GJF ;

MCKENZIE, CD ;

MAZZOLINI, AP ;

SEALOCK, RM ;

JAMIESON, DN ;

OBRIEN, PM ;

MCCALLUM, JC ;

ALLAN, GL ;

BROWN, RA ;

COLMAN, RA ;

KIRBY, BJ ;

LUCAS, MA ;

ZHU, J ;

CERINI, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :669-674

[7] AN ACHROMATIC QUADRUPOLE LENS DOUBLET FOR POSITIVE-IONS [J].

MARTIN, FW ;

GOLOSKIE, R .

APPLIED PHYSICS LETTERS, 1982, 40 (02) :191-193

[8] MATERIALS CHARACTERIZATION WITH A HE+ MICROBEAM [J].

MORRIS, WG ;

BAKHRU, H ;

HABERL, AW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY) :697-699

[9] RBS ANALYSIS WITH A 1-MU BEAM [J].

MORRIS, WG ;

KATZ, W ;

BAKHRU, H ;

HABERL, AW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :391-394

[10]

MORRIS WG, 1986, NUCL I METH B, V15, P697

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