RBS ANALYSIS WITH A 1-MU BEAM

被引：18

作者：

MORRIS, WG ^{[1
]}

KATZ, W ^{[1
]}

BAKHRU, H ^{[1
]}

HABERL, AW ^{[1
]}

机构：

[1] SUNY ALBANY,ALBANY,NY 12222

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期

关键词：

D O I：

10.1116/1.583270

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：391 / 394

页数：4

共 14 条

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[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (02) : 1214 - 1219
[3] DOYLE BL, 1981, MICROBEAM ANAL 1981
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 197 (01): : 91 - 96
[5] SEMICONDUCTOR ANALYSIS WITH A CHANNELED HELIUM MICROBEAM
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 521 - 526
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 197 (01): : 243 - 253
[7] CHEMICAL HISTORY WITH A NUCLEAR MICROPROBE
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BURNETT, DS
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (02) : 1224 - 1227
[8] AN ACHROMATIC QUADRUPOLE LENS DOUBLET FOR POSITIVE-IONS
MARTIN, FW
GOLOSKIE, R
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (02) : 191 - 193
[9] CHANNELING CONTRAST MICROSCOPY - APPLICATION TO SEMICONDUCTOR STRUCTURES
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SHORT, KT
WILLIAMS, JS
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (09) : 827 - 829
[10] HELIUM MICROPROBE ANALYSIS OF SEMICONDUCTOR-MATERIALS
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MCKENZIE, CD
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (02) : 1228 - 1231

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