SELECTIVELY ETCHED DIFFRACTION GRATINGS IN GAAS

被引:35
作者
COMERFORD, L [1 ]
ZORY, P [1 ]
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HEIGHTS, NY 10598 USA
关键词
D O I
10.1063/1.1655442
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:208 / 210
页数:3
相关论文
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