SOME PITFALLS IN FAST RAMP C-V MEASUREMENTS

被引:4
作者
MCCAUGHAN, DV [1 ]
MURPHY, VT [1 ]
WALDEN, RH [1 ]
机构
[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA
关键词
D O I
10.1016/0038-1101(73)90057-9
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1423 / 1427
页数:5
相关论文
共 12 条
[1]   INVESTIGATION OF DEEP-DEPLETION REGIME OF MOS STRUCTURES USING RAMP-RESPONSE METHOD [J].
BULUCEA, CD .
ELECTRONICS LETTERS, 1970, 6 (15) :479-+
[2]  
CASTAGNE R, 1968, CR ACAD SCI B PHYS, V267, P866
[4]  
KERR DR, 1969, JUN C PROP US MIS ST
[5]   A QUASI-STATIC TECHNIQUE FOR MOS C-V AND SURFACE STATE MEASUREMENTS [J].
KUHN, M .
SOLID-STATE ELECTRONICS, 1970, 13 (06) :873-+
[6]  
KUHN M, 1970, IEDM PAPER
[7]   ION NEUTRALIZATION PROCESSES AT INSULATOR SURFACES AND CONSEQUENT IMPURITY MIGRATION EFFECTS IN SIO2 FILMS [J].
MCCAUGHAN, DV ;
KUSHNER, RA ;
MURPHY, VT .
PHYSICAL REVIEW LETTERS, 1973, 30 (13) :614-617
[8]   LOW-ENERGY ION-BOMBARDMENT OF SILICON DIOXIDE FILMS ON SILICON [J].
MCCAUGHAN, DV ;
MURPHY, VT .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) :2008-2017
[9]   VACUUM ULTRAVIOLET RADIATION EFFECTS IN SIO2 [J].
POWELL, RJ ;
DERBENWICK, GF .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1971, NS18 (06) :99-+
[10]   CURRENT AND CAPACITANCE TRANSIENT RESPONSES OF MOS CAPACITOR .2. RECOMBINATION CENTERS IN SURFACE SPACE-CHARGE LAYER [J].
SAH, CT ;
FU, HS .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1972, 14 (01) :59-70