ALUMINUM DEPOSITION BY ULTRAVIOLET-LASER PHOTOFRAGMENTATION OF TRIMETHYLALUMINUM ON AL - IDENTIFICATION OF PHOTOPRODUCTS AND DESORPTION DYNAMICS

被引：16

作者：

ORLOWSKI, TE

MANTELL, DA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.575803

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2598 / 2603

页数：6

共 11 条

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