PICOSECOND GAAS AND INGAAS PHOTOCONDUCTIVE SWITCHES OBTAINED BY LOW-TEMPERATURE METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION

被引:11
作者
LIDEIKIS, T
NAUDZIUS, K
TREIDERIS, G
KROTKUS, A
GRIGORAS, K
机构
[1] Semiconductor Phys. Inst., Lithuanian Acad. of Sci., Vilnius
关键词
D O I
10.1088/0268-1242/7/6/018
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High-resistivity GaAs and InGaAs layers have been obtained by the MOCVD growth technique at low temperatures for the first time. The structural and physical properties of the LT-MOCVD-grown GaAs layers were similar to those of annealed LT-MBE GaAs layers-they were of a high crystalline quality with mobilities reaching 2600 cm2 V-1 s-1 and had short carrier lifetimes of 50 ps. The resistivity of the LT-grown InGaAs layers was close to its intrinsic limits. Photoconductive switches with carrier lifetimes of 20 to 40 ps, long-wavelength cut-off of 1.7-mu-m, breakdown voltage of 10 V for a 5-mu-m gap and sensitivity reaching 0.05 A W-1 were fabricated from those layers.
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页码:845 / 849
页数:5
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