共 24 条
[21]
THE EBES4 ELECTRON-BEAM COLUMN
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (01)
:53-56
[22]
Wakamiya W., 1988, International Electron Devices Meeting. Technical Digest (IEEE Cat. No.88CH2528-8), P246, DOI 10.1109/IEDM.1988.32802
[23]
WILSON AD, 1988, UNPUB DEC IEDM 88 SA
[24]
YAU LD, 1979, IEEE T ELECTRON DEV, V26, P451