CLASSICAL ELECTRON TRAJECTORY IN SCANNING ELECTRON-MICROSCOPE MIRROR-IMAGE METHOD

被引：17

作者：

CHEN, H

GONG, H

ONG, CK

机构：

[1] Department of Physics, National University of Singapore, Singapore 0511

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 02期

关键词：

D O I：

10.1063/1.357753

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A scanning electron microscope (SEM) is employed to study the charging phenomenon of polymethylmethacrylate using the mirror image method. Classical scattering theory is modified to calculate the total trapped charge Q. This theory has also been used to justify the use of a fitting procedure to calculate Q. The fitting procedure is more feasible for a SEM which does not have low accelerating voltage facility. Results from both methods are compared. Details of derivation are given.

引用

页码：806 / 809

页数：4

共 12 条

[1] CHARGING AND FLASHOVER INDUCED BY SURFACE POLARIZATION RELAXATION PROCESS [J].