ENHANCEMENT OF ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS OF SURFACE SILANOL IN SILICON-NITRIDE THROUGH CHEMICAL DERIVATIZATION

被引：7

作者：

DANG, TA ^{[1
]}

GNANASEKARAN, R ^{[1
]}

机构：

[1] MANSFIELD UNIV,MANSFIELD,PA 16933

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 03期

关键词：

D O I：

10.1116/1.577636

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The surface silanol on Si3N4 can be successfully determined by reaction of the OH group with tridecafluoro-1,1,2,2-tetrahydrooctyl-1-1-trichlorosilane and subsequent electron spectroscopy for chemical analysis for F. The technique offers both specificity and very high sensitivity. It also has certain advantages over diffuse reflectance infrared Fourier transform, including more surface probing, better quantification, and a significantly lower detection limit.

引用

页码：1406 / 1409

页数：4

共 7 条

[1]

ARKLES B, 1987, SILICON COMPOUNDS RE, P54

[2] DETERMINATION OF AMINO AND SILANOL FUNCTIONAL-GROUPS ON GLASS VIA CHEMICAL DERIVATIZATION AND ESCA [J].