SCANNING ELECTRON-MICROSCOPE MEASUREMENTS ON SHORT CHANNEL MOS-TRANSISTORS

被引：61

作者：

WILSON, CL ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

SOLID-STATE ELECTRONICS | 1980年 / 23卷 / 04期

关键词：

D O I：

10.1016/0038-1101(80)90202-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：345 / &

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