STABILITY OF AS-DOPED AND B-DOPED SI WITH RESPECT TO OVERLAYING COSI2 AND TISI2 THIN-FILMS

被引：61

作者：

MAEX, K

GHOSH, G

DELAEY, L

PROBST, V

LIPPENS, P

VANDENHOVE, L

DEKEERSMAECKER, RE

机构：

[1] CATHOLIC UNIV LEUVEN,DEPT MET & MAT ENGN,B-3030 HEVERLE,BELGIUM

[2] SIEMENS AG,CORP RES & DEV,D-8000 MUNICH 83,FED REP GER

来源：

关键词：

D O I：

10.1557/JMR.1989.1209

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1209 / 1217

页数：9

共 36 条

[1] Barin I., 2013, THERMOCHEMICAL PROPE
[2] BELOUSOV UI, 1979, J PHYS CHEM-US, V53, P1266
[3] TITANIUM DISILICIDE FORMATION ON HEAVILY DOPED SILICON SUBSTRATES
BEYERS, R
COULMAN, D
MERCHANT, P
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (11) : 5110 - 5117
[4] PHASE-EQUILIBRIA IN THIN-FILM METALLIZATIONS
BEYERS, R
SINCLAIR, R
THOMAS, ME
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04): : 781 - 784
[5] PHASE-EQUILIBRIA IN METAL-GALLIUM-ARSENIC SYSTEMS - THERMODYNAMIC CONSIDERATIONS FOR METALLIZATION MATERIALS
BEYERS, R
KIM, KB
SINCLAIR, R
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (06) : 2195 - 2202
[6] HEAT OF MIXING OF LIQUID ALLOYS .1.
BOOM, R
BOER, FRD
MIEDEMA, AR
[J]. JOURNAL OF THE LESS-COMMON METALS, 1976, 45 (02): : 237 - 245
[7] HEAT OF MIXING OF LIQUID ALLOYS .2.
BOOM, R
DEBOER, FR
MIEDEMA, AR
[J]. JOURNAL OF THE LESS-COMMON METALS, 1976, 46 (02): : 271 - 284
[8] TITANIUM SILICIDE FORMATION ON BORON-IMPLANTED SILICON
CHOW, TP
KATZ, W
GOEHNER, R
SMITH, G
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (08) : 1914 - 1918
[9] DHEURLE FM, 1980, J APPL PHYS, V51, P5976, DOI 10.1063/1.327517
[10] DIRCKX RR, 1987, CALPHAD, V11, P167