PHASE-EQUILIBRIA IN THIN-FILM METALLIZATIONS

被引：146

作者：

BEYERS, R ^{[1
]}

SINCLAIR, R ^{[1
]}

THOMAS, ME ^{[1
]}

机构：

[1] FAIRCHILD CAMERA & INSTRUMENT CORP,PALO ALTO,CA 94304

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1984年 / 2卷 / 04期

关键词：

D O I：

10.1116/1.582879

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：781 / 784

页数：4

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