EXPERIMENTAL-STUDY OF VERY-HIGH-FREQUENCY PLASMAS IN H-2 BY SPATIOTEMPORALLY RESOLVED OPTICAL-EMISSION SPECTROSCOPY

被引：15

作者：

KAKUTA, S

KITAJIMA, T

OKABE, Y

MAKABE, T

机构：

[1] Department of Electrical Engineering, Keio University, Yokohama, 223

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 7B期

关键词：

VHF PLASMA; DRIVING FREQUENCY; SPATIOTEMPORAL OPTICAL EMISSION SPECTROSCOPY; NET EXCITATION RATE;

D O I：

10.1143/JJAP.33.4335

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A very-high-frequency (VHF) plasma at 100 MHz is experimentally investigated in parallel-plate configuration in H-2 using spatiotemporal optical emission spectroscopy and current-voltage-power waveforms. The observed optical emission intensity and net excitation rate profiles have strong temporal and spatial variations. The VHF plasma is still capacitive, and is maintained by reflected electrons in the oscillating sheath next to the instantaneous cathode. The characteristics of VHF plasmas, that the excitation rate increases in proportion to the square of driving frequency, and that the minimum sustaining voltage and pressure decrease with increasing frequency, are experimentally confirmed at pressures, ranging from 0.01 to 2 Torr and at the frequency of 100 MHz.

引用

收藏

页码：4335 / 4339

页数：5

相关论文

共 20 条

[11] GENERATION OF ELECTRON-CYCLOTRON RESONANCE PLASMA IN THE VHF BAND [J].

ODA, S ;

NODA, J ;

MATSUMURA, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (10) :L1860-L1862

[12] Frequency effects in processing plasmas of the VHF band [J].

Oda, Shunri .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1993, 2 (01) :26-29

[13] EMISSION OF THE H-ALPHA AND H-BETA LINES EXCITED BY ELECTRON-IMPACT ON H-2 [J].

ORTIZ, M ;

CAMPOS, J .

JOURNAL OF CHEMICAL PHYSICS, 1980, 72 (10) :5635-5638

[14] SPATIOTEMPORAL OPTICAL-EMISSION SPECTROSCOPY OF RF DISCHARGES IN SF6 [J].

PETROVIC, ZL ;

TOCHIKUBO, F ;

KAKUTA, S ;

MAKABE, T .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (05) :2163-2172

[15] CAPACITIVELY COUPLED GLOW-DISCHARGES AT FREQUENCIES ABOVE 13.56 MHZ [J].

SURENDRA, M ;

GRAVES, DB .

APPLIED PHYSICS LETTERS, 1991, 59 (17) :2091-2093

[16] ABSOLUTE MEASUREMENT OF THE EXCITATION RATE AND DENSITY OF THE EXCITED SPECIES IN AN RF DISCHARGE FROM OPTICAL-EMISSION SPECTROSCOPY [J].

TOCHIKUBO, F ;

MAKABE, T .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1991, 2 (12) :1133-1137

[17] STUDY OF THE STRUCTURE OF RADIO-FREQUENCY GLOW-DISCHARGES IN CH4 AND H-2 BY SPATIOTEMPORAL OPTICAL-EMISSION SPECTROSCOPY [J].

TOCHIKUBO, F ;

MAKABE, T ;

KAKUTA, S ;

SUZUKI, A .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (05) :2143-2150

[18] STUDY OF THE STRUCTURE IN RF GLOW-DISCHARGES IN SIH4 H2 BY SPATIOTEMPORAL OPTICAL-EMISSION SPECTROSCOPY - INFLUENCE OF NEGATIVE-IONS [J].

TOCHIKUBO, F ;

SUZUKI, A ;

KAKUTA, S ;

TERAZONO, Y ;

MAKABE, T .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (11) :5532-5539

[19] INVESTIGATION OF THE HIGH-FREQUENCY GLOW-DISCHARGE IN AR AT 13.56 MHZ BY SPATIOTEMPORAL OPTICAL-EMISSION SPECTROSCOPY [J].

TOCHIKUBO, F ;

KOKUBO, T ;

KAKUTA, S ;

SUZUKI, A ;

MAKABE, T .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1990, 23 (09) :1184-1192

[20]

WESTER R, 1991, J PHYS D APPL PHYS, V24, P1371, DOI 10.1088/0022-3727/24/8/021