ABSOLUTE MEASUREMENT OF THE EXCITATION RATE AND DENSITY OF THE EXCITED SPECIES IN AN RF DISCHARGE FROM OPTICAL-EMISSION SPECTROSCOPY

被引：17

作者：

TOCHIKUBO, F

MAKABE, T

机构：

[1] Dept. of Electr. Eng., Fac. of Sci. and Technol., Keio Univ., Yokohama

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1991年 / 2卷 / 12期

关键词：

D O I：

10.1088/0957-0233/2/12/003

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.

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页码：1133 / 1137

页数：5

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