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DIAGNOSTICS OF HIGH-FREQUENCY DISCHARGES IN CH4/H2 BY TIME-RESOLVED AND SPACE-RESOLVED OPTICAL-EMISSION SPECTROSCOPY

被引：31
作者：
KOKUBO, T
TOCHIKUBO, F
MAKABE, T
机构：
[1] Department of Electrical Engineering, Faculty of Science and Technology, Keio University, Yokohama 223
来源：
APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 09期
关键词：
D O I：
10.1063/1.103320
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The diagnostic technique of the rf glow discharge at 13.56 MHz is developed by using the spatiotemporally resolved optical emission spectroscopy. New experimental evidence that the temporal excitation rate at the sheath peaks in phase with the maximum of the total current is obtained in a parallel-plate geometry at 13.56 MHz in CH4(10%)/H2 under a typical condition of the plasma chemical vapor deposition of amorphous carbon film at room temperature.
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页码：818 / 820
页数：3
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