STRUCTURE AND OPTICAL-PROPERTIES OF SILICON IMPLANTED BY HIGH-DOSES OF 70 AND 310 KEV CARBON-IONS

被引:21
作者
AKIMCHENKO, IP
KISSELEVA, KV
KRASNOPEVTSEV, VV
TOURYANSKI, AG
VAVILOV, VS
机构
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1980年 / 48卷 / 1-4期
关键词
D O I
10.1080/00337578008209220
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
引用
收藏
页码:7 / 12
页数:6
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共 5 条
  • [1] STRUCTURE OF SILICON-CARBIDE SYNTHESIZED IN DIAMOND AND SILICON BY ION-IMPLANTATION
    AKIMCHENKO, IP
    KISSELEVA, KV
    KRASNOPEVTSEV, VV
    MILYUTIN, YV
    TOURYANSKY, AG
    VAVILOV, VS
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 33 (02): : 75 - 80
  • [2] INFLUENCE OF O-16, C-12, N-14, AND NOBLE-GASES ON CRYSTALLIZATION OF AMORPHOUS SI LAYERS
    KENNEDY, EF
    CSEPREGI, L
    MAYER, JW
    SIGMON, TW
    [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (10) : 4241 - 4246
  • [3] KONOPLEV VS, 1976, RAD EFF SEMICONDUCTO, P244
  • [4] VIBRATIONAL ABSORPTION OF CARBON AND CARBON-OXYGEN COMPLEXES IN SILICON
    NEWMAN, RC
    SMITH, RS
    [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1969, 30 (06) : 1493 - &
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