INTERNAL-STRESS OF THIN SILVER AND GOLD-FILMS AND ITS DEPENDENCE ON GAS-ADSORPTION

Using the highly sensitive bending beam device described in earlier papers the internal stress versus thickness curves of silver and gold have been measured continuously during metal deposition. The contributions due to momentum transfer and heat transfer have been subtracted from the experimentally determined curves. Using the model for the origin of the internal stress which we have developed previously, the measured dependence of the stress curves on the nature of the substrate, on the evaporation rate for the metal deposition and on gas adsorption by the substrate, as well as by the metal itself, are interpreted in terms of changes in the structure of the metal film. © 1979.