SEMICONDUCTOR AND SEMI-INSULATOR RESISTIVITY MEASUREMENTS USING A DIRECT-CURRENT 4 POINT PROBE APPARATUS WITH NON-PENETRATING TIPS

被引：3

作者：

HEILIG, K ^{[1
]}

机构：

[1] DAWB,ZENT INST ELEKTRONENPHYS,ABT ELEKTR HALBLEITER,BERLIN 1199,GERMANY

来源：

SOLID-STATE ELECTRONICS | 1973年 / 16卷 / 04期

关键词：

D O I：

10.1016/0038-1101(73)90189-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：503 / 506

页数：4

共 18 条

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[8] ACCURACY OF 4-PROBE RESISTIVITY MEASUREMENTS ON SILICON [J].

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[9]

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[10]

HEILIG K, 1968, EXP TECH PHYS, V16, P135

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