ION-BEAM DIAGNOSTICS BY DOPPLER SHIFTED LIGHT EMISSIONS

被引：3

作者：

HEINRICH, F

STOLL, HP

HOFFMANN, P

SCHEER, HC

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 05期

关键词：

D O I：

10.1063/1.1142607

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Broad ion beams in the energy range of 0.2 to 1.5 keV originating from a filament source with argon as feed gas have been analyzed by high-resolution emission spectroscopy. The Doppler structure of Ar+ emissions reveals the existence of different velocity classes. Besides slow ions and ions possessing the main beam energy, electronically excited Ar+ ions with twice the main beam energy are detected which are attributed to a single-electron capture process in Ar+ +/Ar collisions. As a preliminary result from a reactive beam extracted from a microwave CF4 source plasma fast F atoms are detected which are attributed to charge exchange and dissociative collisions in the process chamber.

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页码：3063 / 3067

页数：5

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