PHOTOLUMINESCENCE ENHANCEMENT OF INP TREATED WITH ACTIVATED HYDROGEN

被引:17
作者
VIKTOROVITCH, P
BENYAHIA, F
SANTINELLI, C
BLANCHET, R
LEYRAL, P
GARRIGUES, M
机构
[1] CNRS, Ecully, Fr, CNRS, Ecully, Fr
关键词
PHOTOLUMINESCENCE - Inorganic Solids - SEMICONDUCTOR DEVICES; MIS - Optical Properties;
D O I
10.1016/0169-4332(88)90096-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A large enhancement of the photoluminescence intensity emitted by a (100)-oriented InP surface after exposure to activated hydrogen, indicating a sharp reduction of the surface recombination rate, is reported in this work. It is shown, using capacitance-voltage measurements performed on metal-insulator-semiconductor structures, that the hydrogen treatment also results in a strong pinning of the interface Fermi level. These phenomena are interpreted on the following basis: (i) neutralization by hydrogen species of active recombination centers which are deemed to be phosphorus-dangling bonds; an (ii) creation of pinning surface states due to the formation of volatile phosphorus hydride compounds freeing excess indium atoms.
引用
收藏
页码:317 / 326
页数:10
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