MICROSTRUCTURE OF PERMALLOY AND COPPER-FILMS OBTAINED BY VAPOR-DEPOSITION AT VARIOUS INCIDENCE ANGLES

被引:9
作者
NAKAHARA, S [1 ]
KUWAHARA, K [1 ]
NISHIMURA, A [1 ]
机构
[1] HIROSHIMA UNIV,DEPT PRECIS ENGN,HIROSHIMA 730,JAPAN
关键词
D O I
10.1016/0040-6090(80)90011-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:297 / 303
页数:7
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