APPROXIMATE FORMULA FOR ELECTRON-ENERGY VERSUS PATH LENGTH

被引：7

作者：

GREENEICH, JS

VANDUZER, T

机构：

[1] UNIV CALIF, DEPT ELECT ENGN & COMP SCI, BERKELEY, CA 94720 USA

[2] UNIV CALIF, ELECTR RES LAB, BERKELEY, CA 94720 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1973年 / ED20卷 / 06期

关键词：

D O I：

10.1109/T-ED.1973.17705

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：598 / 600

页数：3

共 11 条

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[2]

BERGER MJ, 1964, 1133 NAT AC SCI NAT, P205

[3]

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[5] DETERMINATION OF KILOVOLT ELECTRON ENERGY DISSIPATION VS PENETRATION DISTANCE IN SOLID MATERIALS [J].

EVERHART, TE ;

HOFF, PH .

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EVERHART, TE .

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[7] COMPUTER-CONTROLLED RESIST EXPOSURE IN SCANNING ELECTRON-MICROSCOPE [J].

HERZOG, RF ;

VANDUZER, T ;

GREENEIC.JS ;

EVERHART, TE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1972, ED19 (05) :635-&

[8] COMPUTER-CONTROLLED SCANNING ELECTRON-MICROSCOPE SYSTEM FOR HIGH-RESOLUTION MICROELECTRONIC PATTERN FABRICATION [J].

OZDEMIR, FS ;

BUCKEY, CR ;

WOLF, ED .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1972, ED19 (05) :624-+

[9]

THORNTON PR, 1968, SCANNING ELECTRON MI

[10] ELECTRON BEAM AND ION BEAM FABRICATED MICROWAVE SWITCH [J].

WOLF, HD ;

BAUER, LO ;

BOWER, RW ;

GARVIN, HL ;

BUCKEY, CR .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1970, ED17 (06) :446-&

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