TRAP GENERATION AND OCCUPATION DYNAMICS IN SIO2 UNDER CHARGE INJECTION STRESS

被引:160
作者
NISSANCOHEN, Y [1 ]
SHAPPIR, J [1 ]
FROHMANBENTCHKOWSKY, D [1 ]
机构
[1] HEBREW UNIV JERUSALEM,SCH APPL SCI & TECHNOL,JERUSALEM,ISRAEL
关键词
D O I
10.1063/1.337204
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:2024 / 2035
页数:12
相关论文
共 33 条
[1]  
ASLAM M, 1984, SOLID STATE ELECTRON, V27, P709
[2]   CURRENT INDUCED TRAP GENERATION IN SIO2 [J].
BADIHI, A ;
EITAN, B ;
COHEN, I ;
SHAPPIR, J .
APPLIED PHYSICS LETTERS, 1982, 40 (05) :396-398
[3]  
BALK P, 1983, C SER I PHYSICS, V69, P63
[4]   RECOMBINATION MECHANISMS [J].
BONCH-BRUEVICH, VL ;
LANDSBERG, EG .
PHYSICA STATUS SOLIDI, 1968, 29 (01) :9-+
[6]   CONDUCTION AND TRAPPING OF ELECTRONS IN HIGHLY STRESSED ULTRATHIN FILMS OF THERMAL SIO2 [J].
HARARI, E .
APPLIED PHYSICS LETTERS, 1977, 30 (11) :601-603
[7]   DIELECTRIC-BREAKDOWN IN ELECTRICALLY STRESSED THIN-FILMS OF THERMAL SIO2 [J].
HARARI, E .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (04) :2478-2489
[8]   TRAP GENERATION AND ELECTRON DETRAPPING IN SIO2 DURING HIGH-FIELD STRESSING OF METAL-OXIDE-SEMICONDUCTOR STRUCTURES [J].
HEYNS, MM ;
DEKEERSMAECKER, RF ;
HILLEN, MW .
APPLIED PHYSICS LETTERS, 1984, 44 (02) :202-204
[9]  
HILLEN MW, 1983, APR P INT C INS FILM
[10]  
HU C, 1979, INT ELECTRON DEVICES, P229