SUMMARY ABSTRACT - SILICON GRAPHOEPITAXY

被引:6
作者
GEIS, MW
ANTONIADIS, DA
SILVERSMITH, DJ
MOUNTAIN, RW
SMITH, HI
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期
关键词
D O I
10.1116/1.570730
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:229 / 230
页数:2
相关论文
共 5 条
[1]   CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION [J].
GEIS, MW ;
FLANDERS, DC ;
SMITH, HI .
APPLIED PHYSICS LETTERS, 1979, 35 (01) :71-74
[2]   SILICON GRAPHOEPITAXY USING A STRIP-HEATER OVEN [J].
GEIS, MW ;
ANTONIADIS, DA ;
SILVERSMITH, DJ ;
MOUNTAIN, RW ;
SMITH, HI .
APPLIED PHYSICS LETTERS, 1980, 37 (05) :454-456
[3]   GRAPHO-EPITAXY OF SILICON ON FUSED-SILICA USING SURFACE MICROPATTERNS AND LASER CRYSTALLIZATION [J].
GEIS, MW ;
FLANDERS, DC ;
SMITH, HI ;
ANTONIADIS, DA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1640-1643
[4]  
GEIS MW, 1980, IEEE INT ELECTRON DE, P210
[5]  
GEIS MW, 1980, 12TH P INT C SOL STA