RESONANT SILICON STRUCTURES

[1] NONLINEAR VIBRATIONS AND HYSTERESIS OF MICROMACHINED SILICON RESONATORS DESIGNED AS FREQUENCY-OUT SENSORS [J]. ELECTRONICS LETTERS, 1987, 23 (18) : 952 - 954

[2] BUSER R, IN PRESS

[3] BUSER RA, 1986, OCT FALL M EL SOC SA, P879

[4] AIR AND GAS DAMPING OF QUARTZ TUNING FORKS [J]. SENSORS AND ACTUATORS, 1983, 4 (04): : 555 - 564

[5] ERNISSE EP, 1986, 40TH ANN FREQ CONTR, P216

[6] ETCHED SILICON VIBRATING SENSOR [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1984, 17 (08): : 650 - 652

[7] APPLICATIONS OF PIEZOELECTRIC CRYSTAL DETECTOR IN ANALYTICAL-CHEMISTRY [J]. ANALYTICAL CHEMISTRY, 1977, 49 (13) : 1890 - 1898

[8] RESONANT-MICROBRIDGE VAPOR SENSOR [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (04) : 499 - 506

[9] A BENDING AND STRETCHING MODE CRYSTAL-OSCILLATOR AS A FRICTION VACUUM GAUGE [J]. VACUUM, 1984, 34 (8-9) : 731 - 735

[10] FREQUENCY-DEPENDENCE OF A QUARTZ OSCILLATOR ON GAS-PRESSURE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2184 - 2187

[1] NONLINEAR VIBRATIONS AND HYSTERESIS OF MICROMACHINED SILICON RESONATORS DESIGNED AS FREQUENCY-OUT SENSORS [J]. ELECTRONICS LETTERS, 1987, 23 (18) : 952 - 954

[2] BUSER R, IN PRESS

[3] BUSER RA, 1986, OCT FALL M EL SOC SA, P879

[4] AIR AND GAS DAMPING OF QUARTZ TUNING FORKS [J]. SENSORS AND ACTUATORS, 1983, 4 (04): : 555 - 564

[5] ERNISSE EP, 1986, 40TH ANN FREQ CONTR, P216

[6] ETCHED SILICON VIBRATING SENSOR [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1984, 17 (08): : 650 - 652

[7] APPLICATIONS OF PIEZOELECTRIC CRYSTAL DETECTOR IN ANALYTICAL-CHEMISTRY [J]. ANALYTICAL CHEMISTRY, 1977, 49 (13) : 1890 - 1898

[8] RESONANT-MICROBRIDGE VAPOR SENSOR [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (04) : 499 - 506

[9] A BENDING AND STRETCHING MODE CRYSTAL-OSCILLATOR AS A FRICTION VACUUM GAUGE [J]. VACUUM, 1984, 34 (8-9) : 731 - 735

[10] FREQUENCY-DEPENDENCE OF A QUARTZ OSCILLATOR ON GAS-PRESSURE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2184 - 2187