SYNTHESIS OF TITANIUM NITRIDES BY ACTIVATED REACTIVE EVAPORATION

被引：37

作者：

SURI, AK ^{[1
]}

NIMMAGADDA, R ^{[1
]}

BUNSHAH, RF ^{[1
]}

机构：

[1] UNIV CALIF LOS ANGELES,DEPT MAT,LOS ANGELES,CA 90024

来源：

THIN SOLID FILMS | 1980年 / 72卷 / 03期

关键词：

D O I：

10.1016/0040-6090(80)90543-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：529 / 533

页数：5

共 10 条

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[2]

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[3] MICROSTRUCTURES OF TIN AND TI2N DEPOSITS PREPARED BY ACTIVATED REACTIVE EVAPORATION [J].

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BUNSHAH, RF .

THIN SOLID FILMS, 1979, 63 (02) :333-339

[4]

KIEFFER R, 1970, 126 IR STEEL I PUBL, P157

[5] APPLICATIONS OF WEAR-RESISTANT THICK-FILMS FORMED BY PHYSICAL VAPOR-DEPOSITION PROCESSES [J].

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INAGAWA, K ;

TSURUOKA, K ;

KOMIYA, S .

THIN SOLID FILMS, 1977, 40 (JAN) :155-167

[6] HIGH-RATE DEPOSITION OF HAFNIUM NITRIDE BY ACTIVATED REACTIVE EVAPORATION (ARE) [J].

NIMMAGADDA, R ;

BUNSHAH, RF .

THIN SOLID FILMS, 1979, 63 (02) :327-331

[7]

RAGHURAM AC, 1972, J VAC SCI TECHNOL, V9, P1385

[8] PHYSICAL VAPOR-DEPOSITION OF CHROMIUM AND TITANIUM NITRIDES BY HOLLOW-CATHODE DISCHARGE PROCESS [J].

SATO, T ;

TADA, M ;

HUANG, YC .

THIN SOLID FILMS, 1978, 54 (01) :61-65

[9]

Toth L.E, 1971, TRANSITION METAL CAR

[10] HARD DECORATIVE TIN COATINGS BY ION PLATING [J].

ZEGA, B ;

KORNMANN, M ;

AMIGUET, J .

THIN SOLID FILMS, 1977, 45 (03) :577-582

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